Description
SPECIFICATIONS :
Film Thickness Range | : | 25nm – 3.5 μm |
FFT Thickness Range | : | 3500nm – 35 μm |
Spectrometer wavelength range | : | 340nm – 940nm |
Reflectance wavelength range | : | 390nm – 940nm |
Light Source | : | Tungsten Halogen Quartz Lamp, 20 & 50W (customized) |
Detector | : | CCD linear array, 3648 pixels |
Transmission method | : | Bi-furicated fibre [Glass core & PMMA cladding] |
Precision for thin film stack | : | ± < 1 nm |
Accuracy for same stack | : | ± < 2 nm (without roughness) (compared with SEM) |
Spot size on sample | : | 120 micron with the 5X SLWPA objective |
Working Distance | : | 3 mm |
Optical fiber | : | Multimode Bi-furcated fiber with SMA |
Scanning | : | Manual (Micrometer controlled 15mm scanning) |
Reference Sample | : | Bare NSF66 / Bare Aluminum (customized) / Normal slide |
Dark Sample | : | N-Bk7 black coated / Al Mirror kept at 45° (customized) |
Standard Sample | : | SiO2 thin film on NSF-66 Substrate / Bk7 substrate |
Measuring modes | : | Curve fitting / Regression Algorithms, FFT, FFT + Curve Fit |
Dispersion formulas | : | Cauchy, Sellmeier & Empirical Models |
EMA models | : | Linear EMA, Bruggemann, Maxwell Garnett models |
PC Interface | : | USB |
Features :
- Analyze single and multi-layer films (Indirect method)
- Fiber optic probe for reflectance measurement at normal incident angle.
- CCD linear array detector for absolute reflectance measurement.
- Levenberg – Marquardt curve – fitting algorithm for thickness measurement.
- FFT based Thick-layer thickness measurement standardized with PET films.
- Linear, Bruggemann & Maxwell Garnet approximation models for roughness measurements.
- Absorption & Transmittance studies.
- Parameterized dispersion models such as Cauchy, sellimier, combination & drude for n and k values.
- User extendable materials library
- Data can be saved as an Excel file for extraction of optical properties
Sample Results :
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