Holmarc Variable Angle Spectroscopic Ellipsometer

Spectroscopic Ellipsometer is a non-contact instrument widely used for thin film analysis and measurements. Holmarc’s Spectroscopic Ellipsometer (Ellipsomètre spectroscopique à angle variable Model HO-SE-01) incorporates Rotating Analyzer Ellipsometry(RAE) technology to characterize thin film samples. It uses a high speed CCD array detector to collect the entire spectrum. It measures films from nanometer thickness up to tens of microns and the optical properties from transparent to absorbing materials. It accurately measures optical constants like refractive index, film thickness and extinction coefficient.

HO-SE-01 model is equipped with a 50W Halogen lamp as the light source. A set of motorized rotatable Glan-Thompson polarizers are used as the Polarizer and the Analyser. A motorized Z stage is provided for the automatic focusing of sample and a manual tilting platform is provided for the sample alignment. A motorized XY stage with 30 mm x 30 mm travel is also provided for positioning the sample for measurement at different locations. An optical fiber with SMA connector is used to couple the reflected light from the sample to the spectrometer.

A user-friendly measurement software is provided for the initial calibration and automatic measurements. An analysis software with advanced mathematical fitting algorithm is provided for the deduction of thickness and optical properties from the measured data..